High Precision Glass Wafer

Standard Specification

Parameter Glass Wafer Standard Specification
Material Glass, Fused Silica etc.
Diameter 4”, 6”, 8”, 12” etc.
Diameter Tolerance +/-0.1mm
Mini. THK. 0.2mm(< 6”), 0.3mm(8”), 0.35mm(12”)
TTV <1μm
BOW <20μm
WARP <30μm
Surface Quality 20-10
Roughness Ra<1nm
Chamfer 45°, C0.2+/-0.1mm
Coating Available

* Remark:Customized is available


Parameter Glass Wafer Standard Specification
Material Glass, Fused Silica etc.
Diameter 4”, 6”, 8”, 12” etc.
Diameter Tolerance +/-0.1mm
Mini. THK. 0.2mm(< 6”), 0.3mm(8”), 0.35mm(12”)
TTV <1μm
BOW <20μm
WARP <30μm
Surface Quality 20-10
Roughness Ra<1nm
Chamfer 45°, C0.2+/-0.1mm
Coating Available

* Remark:Customized is available


Application

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